JPH0455746U - - Google Patents
Info
- Publication number
- JPH0455746U JPH0455746U JP9953090U JP9953090U JPH0455746U JP H0455746 U JPH0455746 U JP H0455746U JP 9953090 U JP9953090 U JP 9953090U JP 9953090 U JP9953090 U JP 9953090U JP H0455746 U JPH0455746 U JP H0455746U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- steam
- ion source
- plasma generation
- generation vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9953090U JPH0455746U (en]) | 1990-09-20 | 1990-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9953090U JPH0455746U (en]) | 1990-09-20 | 1990-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455746U true JPH0455746U (en]) | 1992-05-13 |
Family
ID=31841525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9953090U Pending JPH0455746U (en]) | 1990-09-20 | 1990-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455746U (en]) |
-
1990
- 1990-09-20 JP JP9953090U patent/JPH0455746U/ja active Pending
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